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Non-contact Capacitive
Displacement
Measurement System
PS-III
Differential Optical Fibre
Displacement Sensor
ATOPS
Nano Sensor
PM-E
PM-S
Nano-positioning System
Piezo-servo positioner
Lens testing equipment
OTF Measurement System
OTF Production System
OTF Measurement Service
Optical character recognition
MIEZOH MARK III
Motion picture transmission System
Bulk Data Transmission
System
Video/Voice/Data
Transmission
Spectrometer
Microspectrometer
Alignment system
Electronic Autocollimators
Visual autocollimators
Visual testing collimators
Visual testing telescopes
Iron Detectors
Needle Detector
FeaturesSpecificationsApplicationsCatalog


The system consists of a micromotion piezo-stage containing capacitance displacement gauge & high precision feedback controller. Positioning according to input command value can be made by feedback control with the capacitance gauge.
Piezo-servo positioner is constructed with non-friction linear guide driven by high speed piezo-electric actuator and capacitive displacement gauge (PS Sensor) for monitoring the stage position.
Specific hysterisis and creep characteristics of piezo-element are eliminated by feedback control system with PS Sensor which enables us high accuracy positioning easier.
Up to 4 channel sets can be extended in one in one housing.
For customized specifications, please contact us.
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