Product Lineup
Non-contact Capacitive
Displacement
Measurement System
PS-I
PS-III
Differential Optical Fibre
Displacement Sensor
ATOPS
Nano Sensor
PM-E
PM-S
Nano-positioning System
Piezo-servo positioner
Lens testing equipment
OTF Measurement System
OTF Production System
OTF Measurement Service
Optical character recognition
MIEZOH MARK III
Motion picture transmission System
Bulk Data Transmission
System
Video/Voice/Data
Transmission
Spectrometer
Microspectrometer
Alignment system
Electronic Autocollimators
Visual autocollimators
Visual testing collimators
Visual testing telescopes
Iron Detectors
Needle Detector
STAGE
Guide
Non-friction linear guide with elastic hinges
Actuator
Laminated piezo-electric actuator
Stroke
15
µ
m
Resonance frequency
2kHz or more(No-load)
Material
SUS304
Pitching
1 or less second to all strokes
Yawing
1 or less second to all strokes
Position detection
Capacitive displacement gauge (PS Sensor)
Responsibility
10-90% rise time 0.8ms/0-90% rise time 1.2ms
CONTROLLER
Control method
Analog PID control
Reference signal
0-10V analog input, Parallel 16bit digital input
PZT applied voltage
-30 - +130V
Max.PZT drive current
0.1A
Linearity
±0.03%/FS
Resolution
0.01%/FS
Power Supply
AC115 or 230V, ±10% (50/60Hz)
To be specified with order
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Product Lineup
